With its special physical performance of heat-resistant, acid-resistant, low expansion and excellent penetrability, Quartz material of high purity can satisfy the critical requirements of alkdis and heavy metals for carrier material of semiconductor, and becomes the indispensable material in this industry. The diverging pipe and immersion bell are used in the semiconductor processes of diffusion, oxidation, deposition, corrosion carving, and other key processes.
With upgrading of processing and craft technology, quartz material has been more and more widely used in manufacture processes of semiconductor, for example it is used as main base material for the base plate of photographic mask and the key material for high-power illumination tools of high quality.